| Publication details |
| Name: |
Stimulation of the diffusion of phosphorus and antimony in silicon by bombardment with oxygen ions |
| Journal: |
Sov. Phys. Semicond |
| Detail info: |
16(5), 584 – 585 |
| Year: |
1982 |
| Authors: |
V. E. Borisenko, L. F. Gorskaya, A. G. Dutov, K. E. Lobanova.
|
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